SMI membrane pressure sensors

As one of the leader of the membrane pressure sensors market, Silicon Microstructure (SMI) produces its own sensing elements and package it in their facilities located in Milpitas (USA).

Thus, SMI offers a wide range of MEMS membrane sensors from uncompensated miniature sensor to fully calibrated digital sensors for air and gas pressure measurement.

These sensors integrate high accuracy, ultra-fast response time, very low power consumption and drift over time.
These features make it an ideal choice for medical (CPAP, ventilation, emergency care…) and Industrial applications.

SMI offers different formats and packaging to fulfill your requirements.

SMI digital sensors

Capteur Description
SM9541
SM9542

SM9543
SM9541- Différentielle et Relative (Gage)
- 0.15 - 0.3 - 0.6 - 1.5 PSI
- 5 mbar (SM9543)
- Sortie I2C ou Analogique
- Calibré et Compensé
- SOIC16, Ports verticaux et horizontaux
SM3041
SM3042
SM3041- Différentielle et Relative (Gage)
- 3 - 5 - 15 - 30 PSI
- Sortie I2C ou Analogique
- Calibré et Compensé
- SOIC16, Ports verticaux et horizontaux
SM5852-015W

SM5852-003
SM5852-004
SM5852-015
SM5651- Différentielle et Relative (Gage)
- 0.05 - 0.15 - 0.3 - 0.4 - 0.8 - 1.5 PSI
- Sortie I2C et Analogique
- Calibré et Compensé
- DIL8, Substrat Céramique

SMI non compensated sensors

Non-compensated SMI sensors combine robustness and low cost.

They are ideal for automotive industry. They are widely used in MAP and BAP systems to optimize engine performance, and also in EGR and DPF systems for emissions control.

Of course, they also fit perfectly in industrial applications requiring a basic sensor for absolute, differential and gage measurement.

The measurement range goes from 15 to 100 PSIA and from 0.15 to 0.8PSID. SMI is also able to design custom sensors in ranges from very low to medium pressure.

Capteur Description
SM6841
SM6842
SM6841- Absolue 15 - 30 - 60 - 100 PSI
- Non Compensé
- Sortie non amplifié mV
- SOIC 8
SM5420CSM5420- Absolue 15 - 30 - 60 - 100 PSI
- Non Compensé
- Sortie non amplifié mV
- SOIC 8
SM5470SM5470- Différentielle et Gage
- 0.15 - 0.3 - 0.8 PSI
- Non Compensé
- Sortie non amplifié mV
- SOIC 16
SM5651
SM5652
SM5651- Différentielle et Gage 0.15 - 0.3 - 0.8 - 1.5 PSI
- Compensé
- Sortie non amplifié mV
- DIL 8 , Substrat céramique

 

Other SMI products : Bare-Die pressure sensors for standard and harsh environment.