Sensirion Massflow meters for gaz

Benefitted from its strong experience in the design of mass flow meters for industrial and medical applications, Sensirion is the ideal partner to help you developing your new flow measurement solution. Sensirion mass flow meters provide speed, accuracy and stability (no drift over time) for flow measurement over a wide flow range.

Each mass flowmeter integrates a calorimetric micro-sensor MEMS, which measures gas flow by using the thermal measuring method. The sensing element is integrated directly in the signal conditioning circuit and shows great reliability thanks to the CMOSens technology. This unique technological approach provides excellent performance with a very attractive cost.

Sensirion offers mass flow meters for various medical and industrial applications.
Please find below our standard products. Sensirion is also able to provide customized solutions for special applications.

Capteur Description
SFM3000SFM3000- +/- 200slm
- Perte de charge <1mbar @ 60slm
- Calibration Air - N2 - O2
- Pression max 1.3bar
- Précision +/- 3% mv
- Interface I2C
SFM3100SFM3100- +/- 24slm
- Perte de charge <3mbar @ 60slm
- Calibration Air - N2 - O2
- Pression max 1.3bar
- Précision +/- 3% mv
- Sortie Analogique
SFM3200SFM3200- -100 à +250slm
- Perte de charge <1mbar @ 60slm
- Calibration Air - N2 - O2
- Pression max 1.07bar
- Précision +/- 3% mv
- Interface I2C
SFM3200-AW
(Autoclavable)
SFM3200-AW- -100 à +250slm
- Perte de charge <1mbar @ 60slm
- Calibration Air - N2 - O2
- Pression max 1.07bar
- Précision +/- 3% mv
- Interface I2C
SFM3300-AW
(Autoclavable)
SFM3300-AW- -100 à +250slm
- Perte de charge <1.8mbar @ 60slm
- Calibration Air - N2 - O2
- Pression max 1.1bar
- Précision +/- 3% mv
- Interface I2C
SFM4100SFM4100- 0 à 20slm
- Perte de charge <25mbar @ 20slm
- Calibration Air - N2 - O2
- Pression max 6bar
- Précision +/- 3% mv
- Interface I2C
SDP601/611SDP600- Configuration By-Pass
- Précision +/- % mv
- Pression max 2bar

Sensirion Massflow controllers for gas

The Sensirion massflow controllers use all featured advantages from the CMOSens Technology. Unlike conventional technologies using several semiconductor chips (two temperature sensors and one heater) in a by-pass configuration, the SFC from Sensirion integrate all these elements in a single chip and measure the flow directly in the main stream.

Sensirion technology

SFCsensirion

Standard technology

SFCstandard

With this disruptive principle, the SFCs are faster, have no drift over time and offer the greatest dynamic range measurement with a 1:1000 ratio.

Contrôleur Description
SFC5000SFC5000- Nouvelle génération
- 10 - 50 - 100 - 200 - 500 sccm
- 1 - 2 - 5 - 10 - 20 - 50 - 100 - 200slm
- Précision <1% valeur mesurée
- Répétabilité < 0.2%
- Temps de réponse <50ms
- Calibration multi-gaz
- Interface Analogique et Digitale
- Connecteurs VCR, VCO, Swagelok et autres
- Pression max 10 bar
SFC4000SFC4000- 0 - 500sccm / 0 - 20 slm
- Précision <1% mv
- Répétabilité <0.1% mv
- Calibration multi-gaz
- Interface Analogique
- Temps de réponse <100ms
SFC3000SFC3000- 0 - 200mln/min / 0 - 10 ln/minslm
- Précision <2% mv
- Répétabilité <0.1% mv
- Calibration multi-gaz
- Interface RS485
- Temps de réponse <300ms

 

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